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Improved Laser Micro-machining and Ablation of Materials/Films with Variable Multi-beams/Wavelength equipment and processing

IP.com Disclosure Number: IPCOM000014610D
Original Publication Date: 2000-Aug-01
Included in the Prior Art Database: 2003-Jun-20

Publishing Venue

IBM

Abstract

For advanced photolithography exposure, laser micromachining and ablation of single of multi-phase materials, a single light source (optical, laser... etc) of one wavelength is normally used for these applications. Described is the use of multi-source and wavelength light source (laser /optical) to process