Browse Prior Art Database

Corner Rounding of Mold Pattern for Plating in MEMS Fabrication

IP.com Disclosure Number: IPCOM000015174D
Original Publication Date: 2002-Apr-11
Included in the Prior Art Database: 2003-Jun-20

Publishing Venue

IBM

Abstract

Disclosed is a method to avoid the mold crack during plating in MEMS (Micro Electro Mechanical Systems) Fabrication. Plating, e.g. Ni plating, is often used for MEMS Fabrication. And the patterning the mold, e.g. PMMA, prior to plating is the most popular method for the patterned plating. If the corner of the mold pattern is sharp or perpendicular, the mold sometimes cracks from the sharp corner during plating, and it sometimes results in the pattern short or bring the difficulties to the next process. This corner rouding of mold pattern can avoid the above problem. Generally the mold pattern has the sharp corner. (see Fig.1) The mold sometimes cracks from the sharp corner during plating, and it sometimes results in the pattern short. (see Fig.2) Fig.1 The mold pattern which has the sharp corner Fig.2 The mold crack