Browse Prior Art Database

Three stripe calibration system

IP.com Disclosure Number: IPCOM000015184D
Original Publication Date: 2001-Sep-13
Included in the Prior Art Database: 2003-Jun-20

Publishing Venue

IBM

Abstract

Disclosed is a wafer having elements with 3 different stripe heights repeating across rows as in figure 2. Stripe heights would be in the order of 3 um, then, 1.5 um, then, 1 um, repeating successively until each row is populated. At final wafer measurement, resistance is recorded for each row. For the purpose of this disclosure, on a row by row basis these sets of resistance values will be used to resolve calibration equations. Figure 1 3.0 um 1/SH .33 um