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Shaping of magnetic pieces via ion implantation Disclosure Number: IPCOM000015752D
Original Publication Date: 2002-Sep-01
Included in the Prior Art Database: 2003-Jun-21

Publishing Venue



Present thin film head write pole tips are 'notched' to improve the localization of the head field and thus produce a written transition width, i.e., trackwidth, dimension which is close to the physical P2, or top yoke, dimension. A notched head is formed by removing P1, or bottom pole piece, material, typically via ion milling using the P2 material as a mask. An undesirable effect of this process is that it also removes material from P2 and this thickness reduction reduces the efficiency of the write head. This invention describes an alternative technique to create effective "notches" in pole pieces using ion implantation. The P1 material is not removed but rather ion implanted to reduce the moment of the material locally. This process provides for minimum thickness reduction of the P2 pole tip. The 'notching' process and the physics of 'notching' are shown schematically below. Notching is a process in which the top pole, P2, trackwidth dimension is transferred into the bottom pole, P1, layer. The trackwidth dimension is transferred using ion milling with the top P2 structure being a mask. As shown above, after the P2 shape is plated, the resist is removed and the seedlayer is etched. Then ion milling is used to remove the gap and the P1 material. During this milling process, the P2 1