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TFT Defect detection by scanning with V-pull mode

IP.com Disclosure Number: IPCOM000016104D
Original Publication Date: 2002-Sep-22
Included in the Prior Art Database: 2003-Jun-21

Publishing Venue

IBM

Abstract

Disclosure is a defect detection method for manufacturing TFT array. Figure shows the current detection method and new detection method. This invention provides to detect new ITO-ITO short mode of PFA TFT array. This advantage result in manufacturing yield up. 1 2