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Cleaning efficient FOUP based on surface with lotus effect Disclosure Number: IPCOM000017523D
Original Publication Date: 2001-Apr-01
Included in the Prior Art Database: 2003-Jul-23

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Michael Lering [+details]


Surfaces such as known from Lotus plant have a structure similar to a toothbrush. Particles are not able to stick on because they have no good contact with this surface and can be easily rinsed away with water. Currently available FOUPs (Front Opening Unified Pod) made of plastics material reach a maximal cleaning efficiency of 98% 0.5 µm particles or less for smaller particles. With every cleaning cycle the FOUP becomes more contaminated.