Standard Components as Wafer Storage Compartments in Single Wafer Stocker
Original Publication Date: 2001-Oct-01
Included in the Prior Art Database: 2003-Jul-23
If it is intended to store wafers in a special storage device, for example for storing test wafers, there is the need for a wafer supporting frame. The manufac- turing of these components is a very costly process, typically done by injection moulding. Instead of producing new and application specific wafer supporting frames, there is the possibility to implement already existing components. One possible substitute is the usage of open wafer cassetes accor- ding to SEMI standard E 1.9 (see Fig. 1). A second alternative is to use wafer boats as they are typically used in hot processing equipments. In a third case, there is an option to use FOUPs as storage compart- ments within a single wafer stocker. The whole con- cept aims at a cost saving approach for using avai- lable and standardized „building blocks“ for compo- sing a single wafer storage system. It will be a costsaving option to use old wafer boats as „building block“. Used under normal temperature conditions, their surface quality and tolerances of measurements will be sufficient for the suggested application, even though they do not meet the requi- rements for hot pocessing any longer.