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BCB Surface Roughening for Improving Metal Adhesion Via Cryogenic CO2

IP.com Disclosure Number: IPCOM000018755D
Publication Date: 2003-Aug-06

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that improves the adhesion between the metal layer and the BCB layer (for RDL applications), by using cryogenic CO2 to roughen the BCB surface. Benefits include an increased contact surface between the metal and BCB layers.