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Method for the use of a femtosecond laser for 9-inch C4 quartz mask repair

IP.com Disclosure Number: IPCOM000019038D
Publication Date: 2003-Aug-27

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the use of a femtosecond laser for 9-inch controlled collapse chip Connect (C4) quartz mask repair. Benefits include improved functionality.