Method for activated gaseous and vapor HF delivery methodologies for creating uniform low-K ILD systems
Publication Date: 2003-Aug-27
The IP.com Prior Art Database
Disclosed is a method for activated gaseous and vapor hydrogen fluoride (HF) delivery methodologies for creating uniform low-dielectric constant (K) interlayer dielectric (ILD) systems. Benefits include improved functionality, improved performance, and improved support for future technology.