The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Method for the PVD of metallic TIM directly onto wafers

IP.com Disclosure Number: IPCOM000019315D
Publication Date: 2003-Sep-10

Publishing Venue

The IP.com Prior Art Database


Disclosed is a method for the physical vapor deposition (PVD) of metallic thermal interface material (TIM) directly onto wafers. Benefits include improved performance, improved process simplification, and improved cost effectiveness.