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Gas Cabinet - Automated Back-up System

IP.com Disclosure Number: IPCOM000019374D
Publication Date: 2003-Sep-12

Publishing Venue

The IP.com Prior Art Database

Abstract

An Automated Backup System (ABS) was developed in an effort to reduce the operating and initial capital costs for a semiconductor fabrication facility, while still retaining uninterrupted gas supply. By reducing the total number of cabinets that need to be exhausted, the operating costs associated with cabinet ventilation can be reduced. Capital costs are lower due to a combination of the reduced size of the ventilation/scrubber system as well as the reduction in the number of cabinets that need to be purchased.