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METHOD FOR PMMA DISOOUTION IN THE PRESENCE OF EPOXY-BASED DIELECTRIC

IP.com Disclosure Number: IPCOM000019544D
Original Publication Date: 2003-Sep-18
Included in the Prior Art Database: 2003-Sep-18

Publishing Venue

IBM

Abstract

Methyl formate is shown to be a selective stripping solvent for the dissolution of thick PMMA films in the presence of several varieties of cycloaliphatic epoxy-based polymers. The method described avoids the swelling and damage to epoxies caused by other solvents and is especially useful for MEMS structures developed using X-ray lithography. Methyl formate is also a good solvent for PMMA indirectly crosslinked by high-energy radiation.