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Electrochemical method for forming noble metal oxides and structures formed thereof

IP.com Disclosure Number: IPCOM000019545D
Original Publication Date: 2003-Sep-18
Included in the Prior Art Database: 2003-Sep-18

Publishing Venue

IBM

Abstract

Electrochemical anodization is described as a simple, low-temperature method for incorporating oxygen into noble metals (and/or noble metal alloys) used as electrodes in contact with oxygen-containing dielectrics such as SiO2 and (Ba,Sr)TiO3.