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ALGORITHM FOR BREAKUP AND CHECKING OF LINES TO COMBAT DISHING IN MULTILEVEL DAMASCENE BEOL

IP.com Disclosure Number: IPCOM000019649D
Original Publication Date: 2003-Sep-24
Included in the Prior Art Database: 2003-Sep-24

Publishing Venue

IBM

Abstract

Disclosed is a method and structure which achieves automated control of Damascene interconnect resistances, regardless of linewidth, in such a manner as to combat dishing and erosion from the chemical mechanical polishing process.