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Method for the deposition of a cobalt shunt layer using a spin-on coating technique

IP.com Disclosure Number: IPCOM000019839D
Publication Date: 2003-Oct-01

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the deposition of a cobalt shunt layer using a spin-on coating technique. Benefits include improved performance, improved yield, and an improved manufacturing environment.