CASSETTE BOAT HOLDER MODIFICATION
Original Publication Date: 2000-Nov-01
Included in the Prior Art Database: 2004-Jan-16
Sony Technical Digest
This invention falls within the field of semiconductor etch technology, and is an adapter that will allow a robot arm designed to hold five inch cassette boats to hold both five inch and six inch cassette boats. A robot arm is typically used to agitate the wafer while in the etch solution in order to dislodge hydrogen bubbles that become attached to the wafers. The robot arm holds two cassettes, and the adapter has four slots where the cassettes are inserted. The pair of slots of the left side of the robot arms have a greater distance between, and this design allows the six inch cassettes to be held by the robot. In comparison, the slots on the right side of the robot arms are closer and allow five inch cassettes to be attached. Therefore, the end user has the flexibility to run either the five or six inch wafers, or both.