POLYETHYLENE RF COIL COVER
Original Publication Date: 2000-Nov-01
Included in the Prior Art Database: 2004-Jan-16
Sony Technical Digest
RF coils heat a graphite susceptor on which silicon wafers are placed, with the heating of the graphite susceptor being accomplished through induction. The distance between the RF coils and the graphite susceptor is critical, which is in turn important to the doped epitaxial film deposited on the silicon wafers. A variance of one-sixteenth of an inch in the distance between the coils and susceptor can make a large difference in the temperature profile across the susceptor, and this greatly affects wafer to wafer resistivity uniformity.