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Process and Quality Control of Polymer Pellicles Disclosure Number: IPCOM000022118D
Publication Date: 2004-Feb-25

Publishing Venue

The Prior Art Database


Disclosed is a method for the non-destructive process control of polymer pellicles during production. The disclosed method uses non-destructive contact angle measurements to characterize changes in pellicle properties caused by exposure to irradiation at any wavelength. Benefits include using the established correlation between the value of the contact angle and irradiation exposure dose at a particular wavelength.