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OPTICAL MEASURING ARRANGEMENTS

IP.com Disclosure Number: IPCOM000023449D
Original Publication Date: 1977-Oct-31
Included in the Prior Art Database: 2004-Mar-31

Publishing Venue

Xerox Disclosure Journal

Abstract

A method of identifying Small defects in a specular surface comprising scanning the surface with a narrow light beam and monitoring the deviations of the beam reflected from the surface from its expected path to determine whether the small defects are valleys or hills-