POST ETCH METALLIZATION
Original Publication Date: 1984-Oct-31
Included in the Prior Art Database: 2004-Apr-04
Xerox Disclosure Journal
Referring to Figure 1, silicon microdeflectors are micro-miniature cantilever beams or fingers 5, typically Silicon Dioxide (Si02) which due to its resistance to fatigue is ideally suited for such structures. Typical dimensions of finger 5 are J? = approximately 100mm, d = approximately lOrnm, and t = approximately 0.35mm. The application of a voltage between the metallization on the finger 5 and the bottom of the well 6 in the Silicon (Si) wafer or chip 7 will result in a deflection of the finger. Many applications for microdeflectors have been disclosed in the literature, with much of the interest being due to the ability to incorporate on the same chip of silicon both the microdeflectors and associated driving and/or sensing circuitry.