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TECHNIQUES TO ENABLE THE FABRICATION OF WIDE, FLAT SILICON MICRODEFLECTORS

IP.com Disclosure Number: IPCOM000025347D
Original Publication Date: 1984-Oct-31
Included in the Prior Art Database: 2004-Apr-04

Publishing Venue

Xerox Disclosure Journal

Abstract

TECHNIOUES TO Eh'ABLE THE FAERICATION OF WIDE, FLAT SILICON MICRO- DEFLECTORS (Cont'd) - 350 XEROX DISCLOSURE JOURNAL Volume 9 Number 5 September/October 1984 TECHNIQUES TO ENABLE THE FABRICATION OF WIDE, FLAT SILICON MICRO- DEFLECTORS (Cont'd)