CRITICALLY DAMPED SILICON MICRODEFLECTORS
Original Publication Date: 1985-Feb-28
Included in the Prior Art Database: 2004-Apr-04
Xerox Disclosure Journal
In the design of a silicon microdeflector, for use for example as a facet tracker or print bar, one of the major requirements is that the microdeflector be fast enough to return to the undeflected state in time to be ready for the next deflection. However, when the voltage is removed from a deflected beam such as a microdeflector (a microdeflector can be considered as a cantilever beam), the beam behaves like a damped free spring-mass vibratory system. As a consequence, the beam will return to its undeflected state over a time interval and with or without oscillations as determined by the damping properties, i.e., the damping factor (Q), of the system. Under critical damping condition (0 = K), the beam will return to its equilibrium position in the shortest possible time and without oscillations. This proposal describes how a microdeflector with a given config-uration can be critically damped by adjusting the width of the microdeflector finger or fingers and the viscosity of the ambient gas in which the microdeflector operates.