ENHANCED CONTAMINANT OUTGASSING IN AN ULTRA-HIGH VACUUM SYSTEM EMPLOYING A MICROWAVE GENERATOR
Original Publication Date: 1985-Aug-31
Included in the Prior Art Database: 2004-Apr-04
Xerox Disclosure Journal
W e propose the use of a microwave generator tuned to vibrational or rotational frequencies of contaminant molecules as a method for aiding degassing or dissolution of these contaminants in ultra-high vacuum systems.