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SILICON MICRODEFLECTOR WAFER DESIGN FOR ELECTRO-DEPOSITION OF PYRROLE

IP.com Disclosure Number: IPCOM000025595D
Original Publication Date: 1986-Aug-31
Included in the Prior Art Database: 2004-Apr-04

Publishing Venue

Xerox Disclosure Journal

Abstract

Silicon microdeflectors comprise a row of flexible fingers supported for bending movement in cantilever fashion on a silicon base In fabricating microdeflectors which will absorb light, pyrrole, which is used as the light absorbing material, is electro-chemically deposited on a layer of gold previously deposited on the surface of the individual fingers