SELF-CONTAINED VARIABLE RANGE ESV SENSOR BASED ON MICRODEFLECTION TECHNOLOGY
Original Publication Date: 1991-Feb-28
Included in the Prior Art Database: 2004-Apr-05
Xerox Disclosure Journal
Described is a potentially low cost, very compact and self-contained Electrostatic Voltmeter (ESV) sensor head based on silicon microdeflector technology. The ESV is expected to have relatively high accuracy and variable range. The proposed structure is that of a torsional see-saw.