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SELF-CONTAINED VARIABLE RANGE ESV SENSOR BASED ON MICRODEFLECTION TECHNOLOGY

IP.com Disclosure Number: IPCOM000026268D
Original Publication Date: 1991-Feb-28
Included in the Prior Art Database: 2004-Apr-05

Publishing Venue

Xerox Disclosure Journal

Abstract

Described is a potentially low cost, very compact and self-contained Electrostatic Voltmeter (ESV) sensor head based on silicon microdeflector technology. The ESV is expected to have relatively high accuracy and variable range. The proposed structure is that of a torsional see-saw.