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METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM

IP.com Disclosure Number: IPCOM000026686D
Original Publication Date: 1993-Apr-30
Included in the Prior Art Database: 2004-Apr-06

Publishing Venue

Xerox Disclosure Journal

Abstract

As illustrated in Figure 1, the focused ion stream (FIST) ion writing system uses a large ion aperture 12 to generate a linear two axis array of hi hly