ELIMINATION OF EDGE BEAD IN SPIN COATING PROCESS
Original Publication Date: 1996-Apr-30
Included in the Prior Art Database: 2004-Apr-07
Xerox Disclosure Journal
One form of thermal ink jet printhead comprises a heater plate or wafer which is bonded to a channel plate or wafer by a polyimide layer which is laid down on the heater plate by a spinning process. Because of the surface tension resulting from this process, beads 5-10 microns thick are formed at the edges of the heater plate as a consequence of the spinning process. As a result, when the two plates are mated together, the laminate is not in as close contact at the edges as at the center.