REMOVABLE INTERIOR PANELS FOR VACUUM DEPOSITION SYSTEMS
Original Publication Date: 1996-Aug-31
Included in the Prior Art Database: 2004-Apr-07
Xerox Disclosure Journal
Planetary coaters employed to fabricate Se alloy drums require extensive maintenance to remove alloy deposited on the top half of the chamber. The alloy is chipped off after about 150 to 200 runs. The process of removing this material is time consuming and reduces productivity. Proposed is a modified coater which uses removable interior panels that can be removed and the material chipped off, therby eliminating downtime and improving operator ergonomics.