ROTATING VACUUM DEPOSITION CHAMBER
Original Publication Date: 1996-Oct-31
Included in the Prior Art Database: 2004-Apr-07
Xerox Disclosure Journal
Planetary tank coaters employed to fabricate selenium (Se) alloy drums require extensive maintenance to remove alloy deposited on the top half of the chamber. The alloy is chipped off after about 150 to 200 runs. The process of removing this material is time consuming and reduces productivity. Proposed is a partially rotatable vacuum chamber that reduces the maintenance work by a factor of about two and improves the ergonomic impact on the maintenance crew.