PROCESS FOR MAKING LITHOGRAPHIC MOLD PATTERNS
Original Publication Date: 1998-Jun-30
Included in the Prior Art Database: 2004-Apr-08
Xerox Disclosure Journal
After preparing a set of registered photomasks of a desired pattern, several layers of a dry film laminate (photosensitive) are built up on a substrate. Each layer is exposed in turn until a three dimensional structure is achieved. Dry films such as Vacrel and Parad can be built into such structures. The device is constructed such that molding material can be fed in from one end while the other end is open to air or a vacuum is attached to aid in filling. After the structure is capped, with possibly, a glass plate, the molding material is fed in and allowed to harden. The completed device is then cut into individual pieces that are then attached to the heater die of a thermal ink jet printhead containing channels formed in polyimide.