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An optimized labyrinth sealing for MEMS stacking and V-Groove "Particle trap" for particle free MEMS devices

IP.com Disclosure Number: IPCOM000029268D
Original Publication Date: 2004-Jun-21
Included in the Prior Art Database: 2004-Jun-21

Publishing Venue

IBM

Abstract

Disclosed is the implementation of a “Particle trap” within MEMS (Micro Electro Mechanical Systems) devices. The disclosed embodiment shows the creation of elaborated labyrinth paths with functions of trapping loose particles that may reach critical areas where they would cause MEMS malfunctions.