Browse Prior Art Database

Method for robust run-to-run control for a lithographic process with a changing working zone and immeasurable disturbances

IP.com Disclosure Number: IPCOM000029752D
Publication Date: 2004-Jul-09

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for stable and robust run-to-run control for a lithographic process with a changing working zone and immeasurable disturbances. Benefits include improved functionality, improved reliability, and improved design flexibility.