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Disclosed is a method for a sensor on an air-bearing platform equipped with wireless connectivity. Benefits include improved functionality and improved performance.
English (United States)
This text was extracted from a Microsoft Word document.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately
58% of the total text.
Method for a sensor on an air-bearing platform equipped
with wireless connectivity
Disclosed is a method for a sensor on an air-bearing platform
equipped with wireless connectivity. Benefits include
improved functionality and improved performance.
Light source detection is required within a tool.
Conventionally, the problem is solved by a fixed-place detector designed into a
tool air-bearing stage. This detector does not perform the required functions
for qualification as a laser writing tool.
The conventional solution does not support taking any
measurements of the UV source at the reticle. The capability to monitor the
performance of a laser writer tool to make mask patterns is limited.
A reticle (or mask) is used in lithography for the purpose of
writing patterns onto wafers.
The disclosed method includes a quartz box with the same form
factor as a mask reticule, which is 6”x6”x1/4”. A cavity is available inside
the box for a wireless communication processor, control electronics, and
detectors. This approach enables the device to be placed in the laser writer
tool without disturbing it. The box is made of quartz so that the detectors can
be illuminated by the light source of the tool.
The key design element of this approach is
the inclusion of the wireless
detection in a small form-factor quartz box.
The disclosed method provides advantages, including: