A DC Electron Plasma for the Sealing of Porous Low-Dielectric Constant ILD Materials
Publication Date: 2004-Jul-29
The IP.com Prior Art Database
Disclosed is a method that uses a DC electron plasma (in the presence of a radical reactive species) to stimulate reactions from ILD (inter-layer dielectric) surfaces and seal porous low-dielectric constant materials. Benefits include a solution that is less expensive and eliminates ion bombardment damage.