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Method for the identification of reticle photo-induced contaminants and pellicle degradation

IP.com Disclosure Number: IPCOM000030173D
Publication Date: 2004-Jul-30
Document File: 5 page(s) / 216K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the identification of reticle photo-induced contaminants and pellicle degradation. Benefits include improved functionality and improved performance.