Browse Prior Art Database

COMBINED OPTICAL OVERLAY/CD TARGET ARRAY

IP.com Disclosure Number: IPCOM000030862D
Original Publication Date: 2004-Aug-30
Included in the Prior Art Database: 2004-Aug-30

Publishing Venue

National Institute of Standards and Technology

Related People

Inventors:
Richard Silver Ravikiran Attota

Abstract

This is a write up to describe a new invention which consists of a method and target design for overlay and critical dimension mesurements using optical methods. The key is two fold. One aspect is to allow optical overlay measurements using device sized dimensions and the other aspect is to enable critcal dimention measurement, but using the same target. The targets are unique for overlay alone, but provide a particularly interesting application when combined with CD measurements.