Nanometer Drilling with Nanometer Precision Using Near-Field Optics
Publication Date: 2004-Oct-14
The IP.com Prior Art Database
A new laser-machining technology is being developed to fabricate sub-wavelength, or nanometer scale, features in ambient condition with nanometer precision. We use NSOM (near-field scanning optical microscope) delivered femto-second pulses to machine targeted substrate surface. The ablation laser has a pulse width of 150 femto-second and wavelength of 387-nm. The distance between fiber probe and the substrate is controlled to be much less than wavelength of 387 nm.