The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

EUV Beam Transit System Design

IP.com Disclosure Number: IPCOM000032429D
Publication Date: 2004-Nov-04

Publishing Venue

The IP.com Prior Art Database

Related People

Other Related People:


Purpose and advantage of invention: This invention provides a means by which to deliver 2 parallel path laser beams. Short description of invention (Include or attach appropriate sketches, and point out novel features): See attached drawings:The BTS contains 4 active turning mirrors, 2 beam expander modules, a ridged frame rail structure and platform stand.