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EUV Beam Transit System Design

IP.com Disclosure Number: IPCOM000032429D
Publication Date: 2004-Nov-04

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Abstract

Purpose and advantage of invention: This invention provides a means by which to deliver 2 parallel path laser beams. Short description of invention (Include or attach appropriate sketches, and point out novel features): See attached drawings:The BTS contains 4 active turning mirrors, 2 beam expander modules, a ridged frame rail structure and platform stand.