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Tip and Probe Fabrication Method

IP.com Disclosure Number: IPCOM000034170D
Original Publication Date: 1989-Jan-01
Included in the Prior Art Database: 2005-Jan-26

Publishing Venue

IBM

Related People

Authors:
Smith, DA Taranko, AR [+details]

Abstract

A technique is described whereby tips and needle-shaped probes are fabricated with extremely sharp points. The concept provides for the reproducible fabrication of probes with controlled sharpness. It is an improvement over previous methods in that tips and probes are sharper and uniform and are reproducible with a controllable radii. Extremely sharp needle-shaped tips and probes, typically with a radius of less than 500 angstroms, are required in field ion microscopy (FIM), scanning tunneling microscopy (STM), electrical probe contacts for integrated circuits, and medical instrumentation applications. The concept described herein provides a method for fabricating extremely sharp needle-shaped tips and probes that have uniform and reproducible tips with a controllable radii.