DISPERSION OF Pd METAL ON CERAMIC POWDER SURFACES FOR ENHANCED BINDER BURN-OFF
Original Publication Date: 1989-Jan-01
Included in the Prior Art Database: 2005-Jan-27
The coating of Pd metal on the surfaces of ceramic powders used to produce green sheets for semiconductor devices will improve binder burn-off (BBO) in oxidizing atmospheres. In the production of ceramic substrates it is desirable to reduce carbonaceous residue resulting from a sintering step. In this development, Pd compounds (all of oxidation state +2 for Pd) are milled with the ceramic powder in hexamethyldisilazane. This places Me3SiO- groups on the ceramic surface replacing -OH groups and disperses Pd over the surfaces in minute islands. The powder is dried and cast with a resin and a plasticizer in a conventional multilayer ceramic (MLC) sheet casting process. After a calcination step, in which the sheets are placed in an air furnace for 8 hours at 300oC, the carbon residue is N250 ppm.