Method of Personalizing Mesh Patterns in Ceramic Green Sheets Using Hybrid Personalization Techniques
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27
This article describes a technique for personalizing ceramic green sheets with high-density mesh (criss-crossing conductive lines) patterns. A two step process is here disclosed which employs both high power electron beam (E-beam) patterning and conventional metal mask screening to obtain a desired personalization of the mesh pattern. (Image Omitted) Finely focused high-power E-beams are useful for high-precision patterning of ceramic green sheets. In Fig. 1, the ceramic green sheet 1 is first prepared by laminating a thin (e.g., a 0.5 mil thick) metalized mylar sheet 2 on top of it to obtain the MYLAR* ceramic sheet 3 shown. A focused high power electron beam is then scanned across the surface of 3 in a predefined direction to form the line (groove) pattern 4 shown in Fig. 2.