Table Lockdown System
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27
This article describes a table lockdown mechanism which locks an air suspension table in an accurate and rigid position to allow a successful wafer transfer between a wafer handler and inspection equipment on top of the air suspension table. (Image Omitted) In a wafer manufacturing process, machines which do measurements or inspection on features of microscopic size usually have an air suspension table top to prevent ground vibrations to be transmitted to the measuring equipment. Measurements in the microns and submicron range are taken on the surface of the wafers, and any vibrations with amplitude in this range would cause errors.