Browse Prior Art Database

Submillimeter Nozzles for Laser-Jet Plating and Etching

IP.com Disclosure Number: IPCOM000034370D
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27

Publishing Venue

IBM

Related People

Authors:
Kahn, WA Vigliotti, DR Von Gutfeld, RJ [+details]

Abstract

Laser-jet plating and etching is described in U.S. Patent 4,497,692 which also includes a brief description of a glass nozzle that can be used in the laser-jet plating/etching cell to make patterns on the order of 500 microns in diameter. As the need for smaller nozzles arises, it becomes more difficult to use a glassed-on nozzle. This articles describes a nozzle made from platinum which can be used to plate laser-jet gold spots with a diameter on the order of 50-100 microns. In this configuration, the plate from which the nozzle is formed also serves as the anode, thus eliminating a separate component from the previously described laser-jet plating cell. In the present scheme, forming the nozzle from the anode plate and using smaller diameters permits a much shorter nozzle throat.