Wafer Cassette Turntable for Multi-Wafer Integrated Processing
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27
A technique is described whereby a wafer cassette turntable simplifies the exchange transfer process of cassettes between high vacuum chambers during the integrated processing of semiconductor devices. In semiconductor fabrication, multichamber processing tools are important so as to reduce the exposure to impurities and particles. One example is the use of load lock systems: Wafers are introduced from the room into vacuum or controlled ambient chambers (the load lock), the load lock is evacuated, or equilibrated, and then the wafers are transferred from the load lock into the processing tool. This process provides the advantage of never directly exposing the wafers to impurities or particles of the room.