Browse Prior Art Database

Apparatus for Inspection of Surface Contamination on Photoresist Artwork Mounted in a Frame

IP.com Disclosure Number: IPCOM000034678D
Original Publication Date: 1989-Apr-01
Included in the Prior Art Database: 2005-Jan-27

Publishing Venue

IBM

Related People

Authors:
Hecht, LC [+details]

Abstract

Disclosed is a design for an apparatus which enables the inspection of glass artwork mounted in a metal frame for particle contamination on the artwork surface. This inspection can be done in a rapid, non- destructive, non-contact manner. A further unique feature of this disclosure includes the use of parabolic mirrors, Porro prisms, and four-way oblique lighting. The apparatus has the capability to detect particles on the artwork surface >10 microns in diameter. Fig. 1 is a top view of the apparatus. Fig. 2 shows a cross section along lines A-Al. Fig. 3 shows a similiar cross section along lines B-Bl. Fig. 4 shows the light path through the Porro prisms which are cemented together. Fig. 5 shows the light path from the parabolic mirror to the Porro prism. (Image Omitted) The light sources are the 35 mm slide projectors.