Furnace Tube Load and Unload Tool
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-27
This tool provides means for insertion and removal of quartz tubes to and from high temperature furnaces, e.g., furnaces used for processing semiconductor wafers. Ease of handling large quartz tubes, minimization of tube breakage, and reduction of particle generation is achieved by using the tool. Referring to Fig. 1, a quartz tube 3 is supported on rollers 14 which are an integral part of tool fixture 8. Rollers 12 are also a part of fixture 8 and contact sheet metal guide 10. Sheet metal guide 10 rests on the inner surface 4 of the furnace. Vestibule blocks 6 at both ends of the furnace are specially shaped as showm to permit the tool comprised of the tool fixture 8 and sheet metal guide 10 to be installed during insertion and removal of tube 3. The vestibule blocks 6 support tube 3 in the absence of tool fixture 8. Fig.