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Transport Mechanism for Boron Tribromide Bubblers

IP.com Disclosure Number: IPCOM000034933D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-27

Publishing Venue

IBM

Related People

Authors:
Gallant, CR Groves, RF [+details]

Abstract

A transport mechanism is shown that provides containment facilities when handling boron tribromide (BBR3) bubbler vessels. These vessels containing BBR3 are used in diffusion furnaces for base semiconductor processes and pose a safety hazard if broken while being handled and moved from place to place. Boron tribromide, when exposed to moisture in the air or when in contact with a hygroscopic material, forms a dangerous gas (hydrogen bromide) which is a safety hazard in the work place. Vermiculite was thought to be useful and was the material of choice for containment in the past. New OSHA regulations, however, require the suppliers of vermiculite to add moisture due to the asbestos content. In addition, vermiculite is hygroscopic and will absorb atmospheric moisture.