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Reticle Inspection Algorithm

IP.com Disclosure Number: IPCOM000034987D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Knappenberger, JR McKenney, DR Snell, LW [+details]

Abstract

An algorithm has been developed for inspection of reticles which improves the efficiency of the operation and eliminates contamination which may be present using other techniques. In conventional methods, automatic inspection equipment is used to inspect reticles. Usually one die of the reticle is compared to a second identical die on the same reticle. Differences are noted as defects and repaired. However, any defect which appears in both die will not be noted as a difference and repaired. A slow and expensive die-data technique may therefore be used to inspect all reticle dies for repeating defects. Some techniques use die-data inspection equipment to inspect one die in each row of a reticle with the inspected die then used to assure the remaining dies through use of die-die inspection.