Browse Prior Art Database

Concurrent Display of Four SEM Images Using Four Adjacent Pixels Per Sample Point

IP.com Disclosure Number: IPCOM000035010D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Abe, H [+details]

Abstract

This article describes a technique for concurrently displaying four different SEM (Scanning Electron Microscope) images on a CRT display. Four adjacent pixels are used to display four types of information detected at each of SEM sample points so that the four different SEM images are displayed in an intermingled manner on the same display screen. When a number of SEM images are concurrently displayed for comparison, the so-called screen partitioning method or image superimposing method has been used heretofore. However, these methods involve the problems that in the former the SEM images become small and in the latter the SEM images interfere with each other, making close image analysis difficult. The present method is illustrated in the figure.